Microcantilevers Fabrication Process of Silicon-Based (Pb,...

Applied Mechanics and Materials 2011 / 7 Vol. 80-81

Microcantilevers Fabrication Process of Silicon-Based (Pb, La)(Zr, Ti)O3 Antiferroelectric Thick Films for Microactuator Applications

Yang, Yu Hua, Zhao, Zhen Yu, Guan, Xin Feng, Chou, Xiu Jian
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Volume:
80-81
Language:
english
Journal:
Applied Mechanics and Materials
DOI:
10.4028/www.scientific.net/AMM.80-81.13
Date:
July, 2011
File:
PDF, 990 KB
english, 2011
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