Fabrication of InGaAsP/InP Two-Dimensional Periodic Nanostructure with Variable Sizes and Periods Using Laser Holography and Reactive Ion Etching
Lee, Ji-Myon, Oh, Su Hwan, Lee, Chul-Wook, Ko, Hyunsung, Park, Sahnggi, Kim, Ki Soo, Park, Moon-HoVolume:
7
Year:
2004
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.1626993
File:
PDF, 480 KB
english, 2004