A Method for Interpreting V-I Probe in a Capacitively...

Solid State Phenomena 2007 Vol. 124-126

A Method for Interpreting V-I Probe in a Capacitively Coupled Plasma Discharge

Yoo, Su Jin, Kwon, O Dae, Choe, Hee Hwan, Jeon, Jae Hong, Lee, Kang Woong, Seo, Jong Hyun, Seong, Dae Jin, Kim, Jung Hyung, Shin, Yong Hyeon
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
124-126
Year:
2007
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.124-126.327
File:
PDF, 253 KB
english, 2007
Conversion to is in progress
Conversion to is failed