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Preparation of Ge2Sb2Te5 Thin Film for Phase Change Random Access Memory by Magnetron Sputtering on Small Hole Patterns
Kikuchi, Shin, Nishioka, Yutaka, Kimura, Isao, Jimbo, Takehito, Ueda, Masahisa, Kokaze, Yutaka, Suu, KoukouVolume:
997
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0997-I12-02
Date:
January, 2007
File:
PDF, 528 KB
english, 2007