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[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - In-situ FTIR Study of Atomic Layer Deposition (ALD) of Copper Metal Films
Dai, Min, Kwon, Jinhee, Langereis, E., Wielunski, Leszek S., Chabal, Yves, Li, Zhengwen, Gordon, RoyVolume:
11
Year:
2007
Language:
english
DOI:
10.1149/1.2779073
File:
PDF, 340 KB
english, 2007