Curvature Evaluation of Si/3C-SiC/Si Hetero-Structure Grown by Chemical Vapor Deposition
Anzalone, Ruggero, Camarda, Massimo, Severino, Andrea, Piluso, Nicolo, La Via, FrancescoVolume:
778-780
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.778-780.255
Date:
February, 2014
File:
PDF, 398 KB
english, 2014