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The Study on the Ultrasonic Nanomachining of Au/Ti Thin Film by Atomic Force Microscopy
Huang, Jen Ching, Chang, Ho, You, Yong Chin, Ling, Hui TiVolume:
627
Language:
english
Journal:
Applied Mechanics and Materials
DOI:
10.4028/www.scientific.net/AMM.627.35
Date:
September, 2014
File:
PDF, 544 KB
english, 2014