Ellipsometric and XPS Studies of 4H-SiC/SiO2 Interfaces,...

Materials Science Forum 2006 Vol. 527-529

Ellipsometric and XPS Studies of 4H-SiC/SiO2 Interfaces, and Sacrificial Oxide Stripped 4H-SiC Surfaces

Guy, O.J., Chen, L., Pope, G., Teng, K.S., Maffeis, T., Wilks, S.P., Mawby, P.A., Jenkins, T.E., Brieva, A., Hayton, D.J.
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Volume:
527-529
Year:
2006
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.527-529.1027
File:
PDF, 304 KB
english, 2006
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