Structure and Lattice Location of Ge Implanted 4H-SiC

Materials Science Forum 2009 Vol. 600-603

Structure and Lattice Location of Ge Implanted 4H-SiC

Kups, Thomas, Tonisch, Katja, Voelskow, M., Skorupa, Wolfgang, Konkin, Alexander, Pezoldt, Joerg
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Volume:
600-603
Year:
2009
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.600-603.623
File:
PDF, 581 KB
english, 2009
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