On the thermal re-oxidation of silicon oxynitride

MRS Proceedings 2003 / 1 Vol. 786

On the thermal re-oxidation of silicon oxynitride

Morales-Acevedo, Arturo, Francisco Pérez-Sánchez, G.
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Volume:
786
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-786-E3.17
Date:
January, 2003
File:
PDF, 292 KB
english, 2003
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