An Effect of the Beam Current and Energy of Fast Electrons on the Production Rates of A-Centres and Divacancies in n-Si
Emtsev, Valentin V., Klinger, P.M., Mashovets, T.V.Volume:
83-87
Year:
1992
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.83-87.321
File:
PDF, 478 KB
1992