Fluorine-Silicon Reactions and the Etching of Crystalline...

Materials Science Forum 1989 Vol. 38-41

Fluorine-Silicon Reactions and the Etching of Crystalline Silicon

Van de Walle, Chris G., McFeely, F.R., Pantelides, Sokrates T.
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Volume:
38-41
Year:
1989
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.38-41.335
File:
PDF, 360 KB
1989
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