δ-Nb-doping Effect to The Interface Between IrO2 Top...

MRS Proceedings 2004 / 1 Vol. 830

δ-Nb-doping Effect to The Interface Between IrO2 Top Electrode and Pb(Zr, Ti)O3 by Metal Organic Chemical Vapor Deposition

Matsuura, Osamu, Yamawaki, Hideki, Nakabayashi, Masaki, Horii, Yoshimasa, Sugiyama, Yoshihiro
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Volume:
830
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-830-D2.3
Date:
January, 2004
File:
PDF, 102 KB
english, 2004
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