Traps at the Interface of 3C-SiC/SiO2-MOS-Structures

Materials Science Forum 2003 Vol. 433-436

Traps at the Interface of 3C-SiC/SiO2-MOS-Structures

Ciobanu, Florin, Pensl, Gerhard, Nagasawa, Hiroyuki, Schöner, Adolf, Dimitrijev, Sima, Cheong, K.Y., Afanas'ev, Valery V., Wagner, Günter
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Volume:
433-436
Year:
2003
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.433-436.551
File:
PDF, 183 KB
english, 2003
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