Enhanced Antimony Activation for Ultra-Shallow Junctions in...

MRS Proceedings 2006 / 1 Vol. 912

Enhanced Antimony Activation for Ultra-Shallow Junctions in Strained Silicon

Bennett, Nick, Smith, A. J., Beer, C. S., O'Reilly, L., Colombeau, B., Dilliway, G. D., Harper, R., McNally, P. J., Gwilliam, R., Cowern, N. E. B., Sealy, B. J.
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Volume:
912
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0912-C02-03
Date:
January, 2006
File:
PDF, 175 KB
english, 2006
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