Electrochemical, Physical, and Electrical Characterization...

Solid State Phenomena 2012 / 4 Vol. 187

Electrochemical, Physical, and Electrical Characterization of Two Clean Solutions for Cu PCMP Clean

Li, Yun Long, Heylen, Nancy, Daviot, Jerome, Reid, Chris, Leunissen, Leonardus
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Volume:
187
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.187.235
Date:
April, 2012
File:
PDF, 406 KB
english, 2012
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