Defect Distribution across 6-Inch CZ-Silicon Wafers

Materials Science Forum 1992 Vol. 105-110

Defect Distribution across 6-Inch CZ-Silicon Wafers

Puff, Werner, Mascher, Peter, Hahn, S.K., Cho, K.H., Lee, B.Y.
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Volume:
105-110
Year:
1992
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.105-110.1185
File:
PDF, 325 KB
1992
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