Research on Amorphous Silicon Thin-Film Structure and...

MRS Proceedings 2006 / 1 Vol. 910

Research on Amorphous Silicon Thin-Film Structure and Growth Processes Using Nonlinear Dynamics Methods

Bodyagin, Nikolay Viktorovich, Vikhrov, Sergey Pavlovich, Larina, Tatiana Gennadievna, Mursalov, Stanislav Mursalovich
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Volume:
910
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0910-A05-01
Date:
January, 2006
File:
PDF, 312 KB
english, 2006
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