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Ultrahigh Resolution in Sputter Depth Profiling with Auger Electron Spectroscopy Using Ionized SF6 Molecules as Primary Ions
Hofmann, Siegfried, Rar, AndreiVolume:
37
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.37.L758
Date:
June, 1998
File:
PDF, 94 KB
english, 1998