Structure, Chemistry, and Electrical Performance of Silicon...

Journal of The Electrochemical Society 2004 Vol. 151; Iss. 12

Structure, Chemistry, and Electrical Performance of Silicon Oxide-Nitride-Oxide Stacks on Silicon

Levin, Igor, Kovler, Mark, Roizin, Yakov, Vofsi, Menachem, Leapman, Richard D., Goodman, Gary, Kawada, Norio, Funahashi, Munabu
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Volume:
151
Year:
2004
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1811594
File:
PDF, 1.02 MB
english, 2004
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