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Comparison of Dry and Wet Etch Processes for Patterning SiO[sub 2]/TiO[sub 2] Distributed Bragg Reflectors for Vertical-Cavity Surface-Emitting Lasers
Dang, G., Cho, H., Ip, K. P., Pearton, S. J., Chu, S. N. G., Lopata, J., Hobson, W. S., Chirovsky, L. M. F., Ren, F.Volume:
148
Year:
2001
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1337606
File:
PDF, 417 KB
english, 2001