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Low Temperature Fabrication of Microcrystalline Silicon Germanium Films by RF Reactive Magnetron Sputtering
Nakamura, Isao, Ajiki, Toru, Isomura, MasaoVolume:
910
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0910-A13-05
Date:
January, 2006
File:
PDF, 135 KB
english, 2006