Growth of AlGaN/GaN HEMTs on 3C-SiC/Si(111) Substrates

MRS Proceedings 2008 / 1 Vol. 1068

Growth of AlGaN/GaN HEMTs on 3C-SiC/Si(111) Substrates

Cordier, Yvon, Portail, Marc, Chenot, Sébastien, Tottereau, Olivier, Zielinski, Marcin, Chassagne, Thierry
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Volume:
1068
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1068-C04-05
Date:
January, 2008
File:
PDF, 1.27 MB
english, 2008
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