Optical Analyses (SE and ATR) and Other Properties of LPCVD...

Journal of The Electrochemical Society 2003 Vol. 150; Iss. 12

Optical Analyses (SE and ATR) and Other Properties of LPCVD Si[sub 3]N[sub 4] Thin Films

Wu, Yun, Zhong, Huicai, Romero, Jeremias, Tabery, Cyrus, Cheung, Cristina, MacDonald, Brian, Bhakta, Jay, Halliyal, Arvind, Cheung, Fred, Ogle, Robert
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Volume:
150
Year:
2003
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1624842
File:
PDF, 118 KB
english, 2003
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