Hot-Implantation of Phosphorus Ions into 6H-SiC

Materials Science Forum 1998 Vol. 264-268

Hot-Implantation of Phosphorus Ions into 6H-SiC

Bouwhuis, L., Ohshima, Takeshi, Itoh, Hisayoshi, Aoki, Y., Yoshikawa, Masahito, Nashiyama, Isamu, Iwami, Motohiro
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Volume:
264-268
Year:
1998
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.264-268.721
File:
PDF, 346 KB
1998
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