Investigation of Rapid Thermal Annealed pn-Junctions in SiC

Materials Science Forum 2004 Vol. 457-460

Investigation of Rapid Thermal Annealed pn-Junctions in SiC

Rambach, Martin, Weiss, Roland, Frey, Lothar, Bauer, Anton J., Ryssel, Heiner
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Volume:
457-460
Year:
2004
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.457-460.1073
File:
PDF, 216 KB
english, 2004
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