Micro-Raman Spectral Analysis of the Subsurface Damage...

Journal of Materials Research 2000 / 7 Vol. 15; Iss. 7

Micro-Raman Spectral Analysis of the Subsurface Damage Layer in Machined Silicon Wafers

Chen, Long-Qing, Zhang, Xin, Zhang, Tong-Yi, Lin, H. Y., Lee, Sanboh
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Volume:
15
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.2000.0209
Date:
July, 2000
File:
PDF, 141 KB
english, 2000
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