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A Comparison of N-Polar (Formula) GaN Surface Preparations for the Atomic Layer Deposition of Al2O3
Wei, D., Hossain, T., Briggs, D. P., Edgar, J. H.Volume:
3
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0201410jss
Date:
August, 2014
File:
PDF, 530 KB
english, 2014