Recent Progress in SiC Epitaxial Growth and Device Processing Technology
Kimoto, Tsunenobu, Yano, Hiroshi, Tamura, S., Miyamoto, Nao, Fujihira, Keiko, Negoro, Yuki, Matsunami, HiroyukiVolume:
353-356
Year:
2001
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.353-356.543
File:
PDF, 455 KB
2001