An analytical model for support loss in micromachined beam...

Sensors and Actuators A: Physical 2003 Vol. 109; Iss. 1-2

An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations

Zhili Hao, Ahmet Erbil, Farrokh Ayazi
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Volume:
109
Year:
2003
Language:
english
Pages:
9
DOI:
10.1016/j.sna.2003.09.037
File:
PDF, 196 KB
english, 2003
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