![](/img/cover-not-exists.png)
3D microfabrication with inclined/rotated UV lithography
Manhee Han, Woonseob Lee, Sung-Keun Lee, Seung S. LeeVolume:
111
Year:
2004
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2003.10.006
File:
PDF, 545 KB
english, 2004