Voltage-tunable piezoelectrically-transduced single-crystal...

Sensors and Actuators A: Physical 2004 Vol. 111; Iss. 1

Voltage-tunable piezoelectrically-transduced single-crystal silicon micromechanical resonators

Gianluca Piazza, Reza Abdolvand, Gavin K. Ho, Farrokh Ayazi
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Volume:
111
Year:
2004
Language:
english
Pages:
8
DOI:
10.1016/j.sna.2003.10.021
File:
PDF, 612 KB
english, 2004
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