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Fabrication and properties of PZT micro cantilevers using isotropic silicon dry etching process by XeF2 gas for release process
Joon-Shik Park, Hyo-Derk Park, Sung-Goon KangVolume:
117
Year:
2005
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2003.10.069
File:
PDF, 311 KB
english, 2005