Fast Characterization of Silicon Membrane Structures by Laser-Doppler Vibrometry
Gerbach, Ronny, Ebert, Matthias, Bagdahn, JoergVolume:
1052
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1052-DD01-06
Date:
January, 2007
File:
PDF, 2.68 MB
english, 2007