Compensation structures for V-grooves connected to square...

Compensation structures for V-grooves connected to square apertures in KOH-etched (1 0 0) silicon: theory, simulation and experimentation

Bruno Wacogne, Zouaoui Sadani, Tijani Gharbi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
112
Year:
2004
Language:
english
Pages:
12
DOI:
10.1016/j.sna.2004.01.014
File:
PDF, 494 KB
english, 2004
Conversion to is in progress
Conversion to is failed