Compensation structures for V-grooves connected to square apertures in KOH-etched (1 0 0) silicon: theory, simulation and experimentation
Bruno Wacogne, Zouaoui Sadani, Tijani GharbiVolume:
112
Year:
2004
Language:
english
Pages:
12
DOI:
10.1016/j.sna.2004.01.014
File:
PDF, 494 KB
english, 2004