Metal patterning on high topography surface for 3D RF...

Sensors and Actuators A: Physical 2004 Vol. 115; Iss. 2-3

Metal patterning on high topography surface for 3D RF devices fabrication

Nga P. Pham, E. Boellaard, W. Wien, L.D.M. van den Brekel, J.N. Burghartz, P.M. Sarro
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Volume:
115
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2004.01.029
File:
PDF, 336 KB
english, 2004
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