Design and simulation of an uncooled double-cantilever...

Sensors and Actuators A: Physical 2004 Vol. 112; Iss. 2-3

Design and simulation of an uncooled double-cantilever microbolometer with the potential for ∼mK NETD

Biao Li
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Volume:
112
Year:
2004
Language:
english
Pages:
9
DOI:
10.1016/j.sna.2004.01.031
File:
PDF, 294 KB
english, 2004
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