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A surface micromachining process for the development of a medium-infrared tuneable Fabry–Perot interferometer
Carlos Calaza, L. Fonseca, M. Moreno, S. Marco, C. Cané, I. GraciaVolume:
113
Year:
2004
Language:
english
Pages:
9
DOI:
10.1016/j.sna.2004.01.047
File:
PDF, 535 KB
english, 2004