Micro NiTi–Si cantilever with three stable positions

Sensors and Actuators A: Physical 2004 Vol. 114; Iss. 1

Micro NiTi–Si cantilever with three stable positions

W.M. Huang, Q.Y. Liu, L.M. He, J.H. Yeo
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Volume:
114
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.sna.2004.02.027
File:
PDF, 207 KB
english, 2004
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