Comparison between bulk micromachined and CMOS X-ray...

Sensors and Actuators A: Physical 2004 Vol. 115; Iss. 2-3

Comparison between bulk micromachined and CMOS X-ray detectors

J.G. Rocha, C.G.J. Schabmueller, N.F. Ramos, S. Lanceros-Mendez, M.V. Moreira, A.G.R. Evans, R.F. Wolffenbuttel, J.H. Correia
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Volume:
115
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2004.02.035
File:
PDF, 208 KB
english, 2004
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