Releasing SU-8 structures using polystyrene as a...

Sensors and Actuators A: Physical 2004 Vol. 114; Iss. 1

Releasing SU-8 structures using polystyrene as a sacrificial material

Cheng Luo, Amitha Govindaraju, John Garra, Thomas Schneider, Robert White, John Currie, Makarand Paranjape
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Volume:
114
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2004.02.042
File:
PDF, 201 KB
english, 2004
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