Studies on Mechanical and Optical Characteristics of TiN Films Deposited on Al, Ti Buffer Layers
Zhang, Mei Jie, Wang, Jing, Gu, Guang Rui, Wu, Bao Jia, Tian, Hong WeiVolume:
809-810
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.809-810.540
Date:
December, 2014
File:
PDF, 761 KB
english, 2014