Studies on Mechanical and Optical Characteristics of TiN...

Studies on Mechanical and Optical Characteristics of TiN Films Deposited on Al, Ti Buffer Layers

Zhang, Mei Jie, Wang, Jing, Gu, Guang Rui, Wu, Bao Jia, Tian, Hong Wei
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Volume:
809-810
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.809-810.540
Date:
December, 2014
File:
PDF, 761 KB
english, 2014
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