Piezoelectric properties and residual stress of sputtered...

Sensors and Actuators A: Physical 2004 Vol. 115; Iss. 2-3

Piezoelectric properties and residual stress of sputtered AlN thin films for MEMS applications

E. Iborra, J. Olivares, M. Clement, L. Vergara, A. Sanz-Hervás, J. Sangrador
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Volume:
115
Year:
2004
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2004.03.053
File:
PDF, 145 KB
english, 2004
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