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Fabrication of miniaturized fluidic devices using SU-8 based lithography and low temperature wafer bonding
P. Svasek, E. Svasek, B. Lendl, M. VellekoopVolume:
115
Year:
2004
Language:
english
Pages:
9
DOI:
10.1016/j.sna.2004.03.055
File:
PDF, 448 KB
english, 2004