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Fabrication of piezoelectric Al0.3Ga0.7As microstructures
Parshant Kumar, Lihua Li, Lynn Calhoun, Paul Boudreaux, Don DeVoeVolume:
115
Year:
2004
Language:
english
Pages:
8
DOI:
10.1016/j.sna.2004.04.002
File:
PDF, 472 KB
english, 2004