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Highly reliable O-ring packaging concept for MEMS pressure sensors
C. Pedersen, S.T. Jespersen, K.W. Jacobsen, J.P. Krog, C. Christensen, E.V. ThomsenVolume:
115
Year:
2004
Language:
english
Pages:
11
DOI:
10.1016/j.sna.2004.04.015
File:
PDF, 292 KB
english, 2004