MEMS electrostatic micropower generator for low frequency operation
P.D. Mitcheson, P. Miao, B.H. Stark, E.M. Yeatman, A.S. Holmes, T.C. GreenVolume:
115
Year:
2004
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2004.04.026
File:
PDF, 283 KB
english, 2004