Comparison of plasma generation behaviors between a single...

Sensors and Actuators A: Physical 2004 Vol. 115; Iss. 1

Comparison of plasma generation behaviors between a single crystal semiconductor bridge (single-SCB) and a polysilicon semiconductor bridge (poly-SCB)

Myung-Il Park, Hyo-Tae Choo, Suk-Hwan Yoon, Chong-Ook Park
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Volume:
115
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.sna.2004.04.038
File:
PDF, 158 KB
english, 2004
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