Symmetrical and decoupled nickel microgyroscope on...

Sensors and Actuators A: Physical 2004 Vol. 115; Iss. 2-3

Symmetrical and decoupled nickel microgyroscope on insulating substrate

Said Emre Alper, Tayfun Akin
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Volume:
115
Year:
2004
Language:
english
Pages:
15
DOI:
10.1016/j.sna.2004.04.041
File:
PDF, 1016 KB
english, 2004
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