Tunable passband T-filter with electrostatically-driven...

Sensors and Actuators A: Physical 2005 Vol. 117; Iss. 1

Tunable passband T-filter with electrostatically-driven polysilicon micromechanical resonators

Dimitri Galayko, Andreas Kaiser, Bernard Legrand, Lionel Buchaillot, Dominique Collard, Chantal Combi
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Volume:
117
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2004.06.002
File:
PDF, 333 KB
english, 2005
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